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Semiconductor

Ultra-pure chemical delivery, wet process, and bubble detection.

1

Case Study

3

Product Families

30+

Years OEM Experience

Overview

Semiconductor and ultra-high-purity fluid handling demand sensors that tolerate aggressive chemistries without contaminating the process. Using its proprietary process, SMD crafts custom pressure sensors from nearly any material — including stainless steel, Hastelloy™, and sapphire — for ultra-high-purity gas and chemical delivery.

Sensing Challenges

How SMD Solves It

Ultra-high purity

Custom ultra-high-purity pressure sensors are built with wetted materials and surface finishes engineered to protect high-purity process gases and fluids.

Aggressive chemistries

SMD's proprietary process crafts pressure sensors in corrosion-resistant materials such as Hastelloy™ and sapphire to survive etchants and slurries.

Non-invasive fluid sensing

Non-invasive ultrasonic bubble and level sensors monitor chemical delivery lines without wetted parts.

Case Studies

Semiconductor Applications

Browse all applications
Ultra High Purity Pressure Sensor
Pressure Sensors

Ultra High Purity Pressure Sensor

A pressure sensor for an ultra high purity measurement in a semiconductor fabrication facility. Requires high accuracy, consistent temperature performance, and a 500 Vac specification.

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SMD Sensors

World leader in miniature OEM sensor design and manufacturing for medical, aerospace, semiconductor, and industrial markets

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